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Decomposition of carbon dioxide in the RF plasma environment
Lien-Te Hsieh, Wen-Jhy Lee, Chun-Teh Li, Chuh-Yung Chen, Ya-Fen Wang, Moo-Been ChangVolume:
73
Année:
1998
Langue:
english
Pages:
11
DOI:
10.1002/(sici)1097-4660(199812)73:43.0.co;2-0
Fichier:
PDF, 302 KB
english, 1998