[Mechanical Engineering Series] The MEMS Handbook Volume 20013566 || Micromachined Pressure Sensors
Gad-el-Hak, MohamedVolume:
10.1201/97
Année:
2001
Langue:
english
DOI:
10.1201/9781420050905.ch25
Fichier:
PDF, 697 KB
english, 2001