Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2015 / 11 Vol. 9; Iss. 6
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Abrasive blasting of silicon surfaces during the thermal-migration process
Lunin, L. S., Seredin, B. M., Seredin, L. M.Volume:
9
Langue:
english
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/s1027451015060348
Date:
November, 2015
Fichier:
PDF, 3.35 MB
english, 2015