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SPIE Proceedings [SPIE 24th European Mask and Lithography Conference - Dresden, Germany (Monday 21 January 2008)] 24th European Mask and Lithography Conference - Design of pattern-specific mask grating for giving the effect of an off-axis illumination
Kim, Young-Seok, Song, Seok Ho, Lee, Jong Ung, Oh, Sung Hyun, Choi, Yong Kyoo, Kim, Munsik, O, Beom-Hoan, Park, Se-Geun, Lee, El-Hang, Lee, Seung GolVolume:
6792
Année:
2008
DOI:
10.1117/12.798809
Fichier:
PDF, 842 KB
2008