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SPIE Proceedings [SPIE Smart Structures & Materials '95 - San Diego, CA (Sunday 26 February 1995)] Smart Structures and Materials 1995: Smart Electronics - Micromachined sensor and actuator research at the Microelectronics Development Laboratory
Smith, James H., Craig Barron, Carole, Fleming, James G., Montague, Stephen, Rodriguez, J. L., Smith, Bradley K., Sniegowski, Jeffry J., Varadan, Vijay K.Volume:
2448
Année:
1995
Langue:
english
DOI:
10.1117/12.210458
Fichier:
PDF, 512 KB
english, 1995