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SPIE Proceedings [SPIE 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies - Dalian, China (Monday 26 April 2010)] 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Fabricating a variety of micro-optics structures using anisotropic etching of silicon
Li, Bin, Yang, Li, Namba, Yoshiharu, Wei, Ming-yue, Wang, Meng, Walker, David D., Li, Shengyi, Zhang, Xin-yu, Xie, Chang-sheng, Zhang, Tian-xuVolume:
7655
Année:
2010
Langue:
english
DOI:
10.1117/12.867722
Fichier:
PDF, 1.02 MB
english, 2010