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SPIE Proceedings [SPIE Photomask and NGL Mask Technology XVI - Yokohama, Japan (Wednesday 8 April 2009)] Photomask and Next-Generation Lithography Mask Technology XVI - Investigation of EUV mask defectivity via full-field printing and inspection on wafer
Jonckheere, Rik, Hosono, Kunihiro, Van Den Heuvel, Dieter, Iwamoto, Fumio, Stepanenko, Nickolay, Myers, Alan, Lamantia, Matt, Goethals, Anne-Marie, Hendrickx, Eric, Ronse, KurtVolume:
7379
Année:
2009
Langue:
english
DOI:
10.1117/12.824268
Fichier:
PDF, 4.84 MB
english, 2009