SPIE Proceedings [SPIE Symposium on Applied Photonics - Glasgow, United Kingdom (Sunday 21 May 2000)] Optical Diagnostics for Industrial Applications - Micro-opto-electro-mechanical systems: recent developments and LETI's activities
Ollier, Eric, Mottier, Patrick L., Halliwell, Neil A.Volume:
4076
Année:
2000
Langue:
english
DOI:
10.1117/12.397949
Fichier:
PDF, 4.06 MB
english, 2000