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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachined Devices and Components III - First reliability test of a surface-micromachined microengine using SHiMMeR
Tanner, Danelle M., Chau, Kevin H., French, Patrick J., Smith, Norman F., Bowman, Duane J., Eaton, William P., Peterson, Kenneth A.Volume:
3224
Année:
1997
Langue:
english
DOI:
10.1117/12.284512
Fichier:
PDF, 2.27 MB
english, 1997