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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Thermoelectric CMOS anemometers
Mayer, Felix, Hintermann, Marcel, Jacobs, Heiko, Paul, Oliver, Baltes, Henry, Chau, Kevin H., Roop, Ray M.Volume:
2882
Année:
1996
Langue:
english
DOI:
10.1117/12.250709
Fichier:
PDF, 2.76 MB
english, 1996