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SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - Improving the backend focus budget for 0.5-um lithography
Sethi, Satyendra S., Flores, Alex, McHale, P., Booth, R., Graca, Steve W., Frezon, S., Fruga, C., Brunner, Timothy A.Volume:
2440
Année:
1995
Langue:
english
DOI:
10.1117/12.209290
Fichier:
PDF, 464 KB
english, 1995