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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Advances in Resist Technology and Processing XXII - Comparison between organic spin-on BARC and carbon-containing CVD stack for 65-nm gate patterning
Chapon, Jean-Damien, Sturtevant, John L., Chaton, Catherine, Gouraud, Pascal, Broekaart, Marcel, Warrick, Scott, Guilmeau, Isabelle, Trouiller, Yorick, Belledent, JeromeVolume:
5753
Année:
2005
Langue:
english
DOI:
10.1117/12.601742
Fichier:
PDF, 343 KB
english, 2005