
SPIE Proceedings [SPIE Photomask and NGL Mask Technology XV - Yokohama, Japan (Wednesday 16 April 2008)] Photomask and Next-Generation Lithography Mask Technology XV - Dependence of mask topography effects on pattern variation under hyper-NA lithography
Mimotogi, Akiko, Horiuchi, Toshiyuki, Itoh, Masamitsu, Mimotogi, Shoji, Sato, Kazuya, Sato, Takashi, Tanaka, Satoshi, Inoue, SoichiVolume:
7028
Année:
2008
Langue:
english
DOI:
10.1117/12.793127
Fichier:
PDF, 1013 KB
english, 2008