SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] Optical Sensing - Confocal micro-optical distance sensor for precision metrology
Luecke, Peter, Culshaw, Brian, Mignani, Anna G., Last, Arndt, Mohr, Juergen, Riesenberg, Rainer, Ruprecht, Aiko, Osten, Wolfgang, Tiziani, Hans J., Lehmann, PeterVolume:
5459
Année:
2004
Langue:
english
DOI:
10.1117/12.545404
Fichier:
PDF, 211 KB
english, 2004