SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Atom Optics - Using neutral metastable argon atoms and contamination lithography to form nanostructures in silicon, silicon dioxide, and gold
Johnson, Kent S., Berggren, Karl K., Black, Andrew J., Black, Charles T., Chu, Arthur P., Dekker, Nynke H., Ralph, D. C., Thywissen, Joseph H., Younkin, Rebecca J., Prentiss, Mara Goff, Tinkham, MichaVolume:
2995
Année:
1997
Langue:
english
DOI:
10.1117/12.273746
Fichier:
PDF, 823 KB
english, 1997
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