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SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III - Fully-scaled 0.25-micron bipolar technology using variable shaped electron-beam lithography
Coane, Philip J., Chiong, Kaolin G., Rothwell, Mary B., Warnock, James, Cressler, John D., Hohn, Fritz J., Thomson, Michael G., Patterson, David O.Volume:
1924
Année:
1993
Langue:
english
DOI:
10.1117/12.146502
Fichier:
PDF, 615 KB
english, 1993