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SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Advances in Resist Materials and Processing Technology XXIV - Two-component photoresists based on acidolytic cleavage of novel ester acetal polymer
Wang, Liyuan, Lin, Qinghuang, Chu, Zhanxing, Cheng, LongVolume:
6519
Année:
2007
Langue:
english
DOI:
10.1117/12.711701
Fichier:
PDF, 141 KB
english, 2007