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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 21 January 2006)] Photon Processing in Microelectronics and Photonics V - Lateral melt expulsion and debris formation during small-scale femtosecond laser ablation
Kudryashov, Sergey I., Okada, Tatsuo, Arnold, Craig B., Meunier, Michel, Holmes, Andrew S., Geohegan, David B., Träger, Frank, Dubowski, Jan J.Volume:
6106
Année:
2006
Langue:
english
DOI:
10.1117/12.647146
Fichier:
PDF, 399 KB
english, 2006