SPIE Proceedings [SPIE International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Kiev, Ukraine (Tuesday 13 May 1997)] Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997 - Optical study of the influence of oxygen on the synthesis of SiC-buried layer in Cz-Si and Fz-Si
Yukhimchuk, V. A., Melnik, V. P., Romanjuk, B. N., Popov, V. G., Klyui, Nickolai I., Svechnikov, Sergey V., Valakh, Mikhail Y.Volume:
3359
Année:
1998
Langue:
english
DOI:
10.1117/12.306247
Fichier:
PDF, 256 KB
english, 1998
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