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SPIE Proceedings [SPIE 17th Annual BACUS Photomask Technology and Management - Redwood City, CA (Wednesday 17 September 1997)] 17th Annual BACUS Symposium on Photomask Technology and Management - Performance of positive-tone chemically amplified resists for next-generation photomask fabrication
Segawa, Toshikazu, Kurihara, Masa-aki, Sasaki, Shiho, Inomata, Hiroyuki, Hayashi, Naoya, Sano, Hisatake, Reynolds, James A., Grenon, Brian J.Volume:
3236
Année:
1998
Langue:
english
DOI:
10.1117/12.301231
Fichier:
PDF, 390 KB
english, 1998