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SPIE Proceedings [SPIE 8th Meeting in Israel on Optical Engineering - Tel Aviv, Israel (Monday 14 December 1992)] 8th Meeting on Optical Engineering in Israel: Optoelectronics and Applications in Industry and Medicine - Photoresists based on chalcogenide glasses for submicron lithography
Bar, Illana, Klebanov, Matvei, Lyubin, Victor, Rosenwaks, Salman, Shtutina, S., Volterra, V., Oron, Moshe, Shladov, Itzhak, Weissman, YitzhakVolume:
1972
Année:
1993
Langue:
english
DOI:
10.1117/12.151100
Fichier:
PDF, 374 KB
english, 1993