International Journal of Computational Materials Science and Surface Engineering
2007 Vol. 1; Iss. 6
Modified-layer formation mechanism into silicon with permeable nanosecond laser
Ohmura, E., Fukuyo, Fumitsugu, Fukumitsu, Kenshi, Morita, HidekiVolume:
1
Année:
2007
Langue:
english
Journal:
International Journal of Computational Materials Science and Surface Engineering
DOI:
10.1504/ijcmsse.2007.017923
Fichier:
PDF, 957 KB
english, 2007