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SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI - Simple measurement technique for resonance frequency of micromachined cantilevers
Bhat, Somashekara, Hartzell, Allyson L., Ramesham, Rajeshuni, Bhattacharya, EnakshiVolume:
6463
Année:
2007
Langue:
english
DOI:
10.1117/12.698280
Fichier:
PDF, 342 KB
english, 2007