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SPIE Proceedings [SPIE International Symposium on Optical Fabrication, Testing, and Surface Evaluation - Tokyo, Japan (Wednesday 10 June 1992)] Intl Symp on Optical Fabrication, Testing, and Surface Evaluation - X-ray mirrors for SR lithography (Invited Paper)
Kaneko, Takashi, Itabashi, Sei-ichi, Saitoh, Yasunao, Okada, Ikuo, Yoshihara, Hideo, Tsujiuchi, JumpeiVolume:
1720
Année:
1992
Langue:
english
DOI:
10.1117/12.132130
Fichier:
PDF, 277 KB
english, 1992