SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Optical/Laser Microlithography - Effect of duty ratio of line and space in phase-shifting lithography
Miyazaki, Junji, Yamaguchi, Atsumi, Fujiwara, Keiji, Yoshioka, Nobuyuki, Morimoto, Hiroaki, Tsukamoto, Katsuhiro, Cuthbert, John D.Volume:
1927
Année:
1993
Langue:
english
DOI:
10.1117/12.150462
Fichier:
PDF, 2.53 MB
english, 1993