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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Novel robust optimization method of lithographic conditions for correlative multilayers beyond 65 nm node
Takeuchi, Koichi, Smith, Bruce W., Ozawa, Ken, Uesawa, Fumikatsu, Kawahira, HiroichiVolume:
5754
Année:
2005
Langue:
english
DOI:
10.1117/12.600175
Fichier:
PDF, 332 KB
english, 2005