SPIE Proceedings [SPIE Photonics Asia 2010 - Beijing, China (Monday 18 October 2010)] Optical Metrology and Inspection for Industrial Applications - Ultraviolet bidirectional reflectance distribution function measurement and analysis of typical roughness surface
Bai, Lu, Harding, Kevin, Huang, Peisen S., Zhang, Han-lu, Cao, Yun-hua, Yoshizawa, Toru, Li, Hai-ying, Wu, Zhen-sen, Wang, Shi-meiVolume:
7855
Année:
2010
Langue:
english
DOI:
10.1117/12.869722
Fichier:
PDF, 463 KB
english, 2010