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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Design for Manufacturability through Design-Process Integration VI - Computational lithography work flows and design rule exploration automation
Sethi, S., Stanton, William, Lucas, Kevin, Hiserote, Jay, Hur, Duck-Hyung, Choi, Rooli, Mason, Mark E.Volume:
8327
Année:
2012
Langue:
english
DOI:
10.1117/12.918057
Fichier:
PDF, 15.88 MB
english, 2012