SPIE Proceedings [SPIE IS&T/SPIE Electronic Imaging - Burlingame, California, United States (Sunday 22 January 2012)] Sensors, Cameras, and Systems for Industrial and Scientific Applications XIII - Development of high-transmittance back-illuminated silicon-on-sapphire substrates thinned below 25 micrometers and bonded to fused silica for high quantum efficiency and high resolution avalanche photodiode imaging arrays
Widenhorn, Ralf, Stern, Alvin G., Nguyen, Valérie, Dupret, AntoineVolume:
8298
Année:
2012
Langue:
english
DOI:
10.1117/12.908983
Fichier:
PDF, 5.91 MB
english, 2012