SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Metrology-based Control for Micro-Manufacturing - High-resolution noncontact thermal characterization of semiconductor devices
Christofferson, James, Vashaee, Daryoosh, Shakouri, Ali, Melese, Philip, Tobin, Jr., Kenneth W., Lakhani, FredVolume:
4275
Année:
2001
Langue:
english
DOI:
10.1117/12.429354
Fichier:
PDF, 368 KB
english, 2001