SPIE Proceedings [SPIE 30th Annual Technical Symposium - San Diego (Friday 1 August 1986)] Multilayer Structures & Laboratory X-Ray Laser Research - Silicon Diffraction Gratings For Multilayer Structures
Ciarlo, D. R., Miller, D. E., Ceglio, Natale M., Dhez, PierreVolume:
688
Année:
1987
Langue:
english
DOI:
10.1117/12.964838
Fichier:
PDF, 6.98 MB
english, 1987