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SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] MOEMS and Miniaturized Systems VIII - Scanning photon microscope based on a MEMS 2D scanner mirror
Grüger, Heinrich, Dickensheets, David L., Schenk, Harald, Knobbe, Jens, Egloff, Thomas, Piyawattanametha, Wibool, Althaus, Marc, Scholles, Michael, Schenk, HaraldVolume:
7208
Année:
2009
Langue:
english
DOI:
10.1117/12.808139
Fichier:
PDF, 1.45 MB
english, 2009