SPIE Proceedings [SPIE Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic technology, and Artificial Intelligence - Beijing, China (Friday 13 October 2006)] Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence - Scanning white-light interferometry for microstructures geometrical characterization
Guo, Tong, Fang, Jiancheng, Wang, Zhongyu, Hu, Chun-guang, Chen, Jin-ping, Fu, Xing, Hu, Xiao-tangVolume:
6357
Année:
2006
Langue:
english
DOI:
10.1117/12.717253
Fichier:
PDF, 480 KB
english, 2006
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