
SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Optimized distributed computing environment for mask data preparation
Ahn, Byoung-Sup, Weed, J. Tracy, Martin, Patrick M., Bang, Ju-Mi, Ji, Min-Kyu, Kang, Sun, Jang, Sung-Hoon, Choi, Yo-Han, Ki, Won-Tai, Choi, Seong-Woon, Han, Woo-SungVolume:
5992
Année:
2005
Langue:
english
DOI:
10.1117/12.632427
Fichier:
PDF, 624 KB
english, 2005