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SPIE Proceedings [SPIE Photomask and Next Generation Lithography Mask Technology XII - Yokohama, Japan (Wednesday 13 April 2005)] Photomask and Next-Generation Lithography Mask Technology XII - Evaluations of optical performance for micro-trench on quartz etch in ArF lithography
Ahn, Won-Suk, Komuro, Masanori, Kwon, Hyuk-Joo, Moon, Seong-Yong, Choi, Seong-Woon, Han, Woo-SungVolume:
5853
Année:
2005
Langue:
english
DOI:
10.1117/12.617227
Fichier:
PDF, 395 KB
english, 2005