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SPIE Proceedings [SPIE Photomask and Next Generation Lithography Mask Technology XII - Yokohama, Japan (Wednesday 13 April 2005)] Photomask and Next-Generation Lithography Mask Technology XII - A reticle quality management strategy in wafer fabs addressing progressive mask defect growth problem at low k1 lithography
Bhattacharyya, Kaustuve, Komuro, Masanori, Eickhoff, Mark, Ma, Mark, Pas, SylviaVolume:
5853
Année:
2005
Langue:
english
DOI:
10.1117/12.617122
Fichier:
PDF, 313 KB
english, 2005