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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - Two-way actuation of bilayer cantilever of nickel titanium and silicon nitride thin films by shape memory effect and stress relaxation
Chiao, Jung-Chih, Wibowo, Edi, Kwok, Chee Y., Hariz, Alex J., Jamieson, David N., Lovell, Nigel H., Parish, Giacinta, Varadan, Vijay K.Volume:
5276
Année:
2003
Langue:
english
DOI:
10.1117/12.521412
Fichier:
PDF, 304 KB
english, 2003