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SPIE Proceedings [SPIE 18th European Mask Conference on Mask Technology for Integrated Circuits and Micro-Components - Munich-Unterhaching, Germany (Tuesday 15 January 2002)] 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents - CD performance of CA-resits with dynamically controlled multizone bake system
Sasaki, Shiho, Kurihara, Masa-aki, Mohri, Hiroshi, Hayashi, Naoya, Dress, Peter, Noering, Andreas, Gairing, Thomas M., Behringer, Uwe F. W.Volume:
4764
Année:
2002
Langue:
english
DOI:
10.1117/12.479343
Fichier:
PDF, 1.26 MB
english, 2002