SPIE Proceedings [SPIE Photomask Japan '97 - Kawasaki City, Japan (Thursday 17 April 1997)] Photomask and X-Ray Mask Technology IV - Leaking light through embedded shifter-type opaque ring for attenuated phase-shift mask
Hirooka, Shoichi, Hasebe, Shigeru, Tsutsui, Tomohiro, Nojima, Shigeki, Aoyama, Hisako, Watanabe, Hidehiro, Aizaki, NaoakiVolume:
3096
Année:
1997
Langue:
english
DOI:
10.1117/12.277279
Fichier:
PDF, 550 KB
english, 1997