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Hollow microcoils made possible with external support structures manufactured with a two-solvent process
Kamberger, R, Moazenzadeh, A, Korvink, J G, Gruschke, O GVolume:
26
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/6/065002
Date:
June, 2016
Fichier:
PDF, 1.51 MB
english, 2016