SPIE Proceedings [SPIE Photonics 2000: International Conference on Fiber Optics and Photonics - Calcutta, India (Monday 26 March 2001)] Photonics 2000: International Conference on Fiber Optics and Photonics - Deep reactive ion etching of silica for planar lightwave circuits using indigenously developed ECR/RIE system
Pachauri, J. P., Baby, Aji, Chaturvedi, N., Kothari, Harshad S., Singh, Awatar, Singh, Babu R., Dixit, P. N., Bhattacharya, R., Lahiri, S. K., Gangopadhyay, Ranjan, Datta, Asit K., Ray, Samit K., MathVolume:
4417
Année:
2001
Langue:
english
DOI:
10.1117/12.441305
Fichier:
PDF, 397 KB
english, 2001
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