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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MOEMS and Miniaturized Systems - Microsystems for diverse applications using recently developed microfabrication techniques
Dellmann, Laurent, Akiyama, Terunobu, Briand, Danick, Gautsch, Sebastien, Guenat, Olivier T., Guldimann, Benedikt, Luginbuhl, Philippe, Marxer, Cornel, Staufer, Urs, van der Schoot, Bart, de Rooij, NiVolume:
4178
Année:
2000
Langue:
english
DOI:
10.1117/12.396492
Fichier:
PDF, 2.95 MB
english, 2000