Development of flexible ZnO thin film surface acoustic wave strain sensors on ultrathin glass substrates
Chen, Jinkai, Guo, Hongwei, He, Xingli, Wang, Wenbo, Xuan, Weipeng, Jin, Hao, Dong, Shurong, Wang, Xiaozhi, Xu, Yang, Lin, Shisheng, Garner, Sean, Luo, JikuiVolume:
25
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/11/115005
Date:
November, 2015
Fichier:
PDF, 1.30 MB
english, 2015