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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Design for Manufacturability through Design-Process Integration VI - Thickness-aware LFD for the hotspot detection induced by topology
Kang, Jae-Hyun, Ha, Naya, Park, Joo-Hyun, Kim, Byung-Moo, Paek, Seung Weon, Choi, Hungbok, Kim, Kee Sup, Mohy, Ahmed, Abdelwahed, Shady, Imam, Mohamed, Mason, Mark E.Volume:
8327
Année:
2012
Langue:
english
DOI:
10.1117/12.917998
Fichier:
PDF, 2.97 MB
english, 2012