SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] Optical Micro- and Nanometrology in Manufacturing Technology - Evolutionary approach to an inverse problem in near-field optics microscopy
Macias, Demetrio, Gorecki, Christophe, Asundi, Anand K., Barchiesi, Dominique, Vial, AlexandreVolume:
5458
Année:
2004
Langue:
english
DOI:
10.1117/12.545793
Fichier:
PDF, 513 KB
english, 2004