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Noncontact Monitoring of Activation and Residual Damage of Dual Implanted Silicon Using Room Temperature Photoluminescence
Yoo, Woo Sik, Jeon, Bong Seok, Kim, Sang Deok, Ishigaki, Toshikazu, Kang, KitaekVolume:
4
Année:
2015
Langue:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0191512jss
Fichier:
PDF, 996 KB
english, 2015