
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Advances in Resist Materials and Processing Technology XXV - Synthesis and evaluation of novel resist monomers and copolymers for ArF lithography: Part II
Henderson, Clifford L., Nakayama, Osamu, Fukumoto, Takashi, Tachibana, Miki, Sato, Junko, Kitayama, Masahiko, Kajiyashiki, TsuyoshiVolume:
6923
Année:
2008
Langue:
english
DOI:
10.1117/12.771130
Fichier:
PDF, 259 KB
english, 2008