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[IEEE 2016 16th International Workshop on Junction Technology (IWJT) - Shanghai, China (2016.5.9-2016.5.10)] 2016 16th International Workshop on Junction Technology (IWJT) - MIS or MS? Source/drain contact scheme evaluation for 7nm Si CMOS technology and beyond
Yu, Hao, Schaekers, Marc, Demuynck, Steven, Barla, Kathy, Mocuta, Anda, Horiguchi, Naoto, Collaert, Nadine, Thean, Aaron Voon-Yew, De Meyer, KristinAnnée:
2016
Langue:
english
DOI:
10.1109/iwjt.2016.7486665
Fichier:
PDF, 5.91 MB
english, 2016