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Numerical Simulation of Bosch Processing for Deep Silicon Plasma Etching
Moroz, P, Moroz, D JVolume:
550
Langue:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/550/1/012030
Date:
November, 2014
Fichier:
PDF, 1013 KB
english, 2014