P-52: Morphological and Electrical Difference in C-axis Aligned Crystalline IGZO Films Based on the Sputtering Method
Kawata, Takuya, Oota, Masashi, Ishihara, Noritaka, Nakashima, Motoki, Takasu, Takako, Kurosawa, Yoichi, Dairiki, Koji, Tsubuku, Masashi, Yamazaki, ShunpeiVolume:
47
Langue:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.10926
Date:
May, 2016
Fichier:
PDF, 1.16 MB
english, 2016